@InProceedings{Supelec936,
author = {Alban Maertens and Samuel Margueron and Frédéric Genty and Ouarda Legrani and Thierry Belmonte and Pascal Boulet},
title = {{Influence of RF Plasma on Zinc Oxide Surface Properties}},
year = {2014},
booktitle = {{Proceedings of the Compound Semiconductor Week}},
pages = {1-2},
month = {may},
address = {Montpellier (France)},
abstract = {The changing of surface properties of ZnO using the RF plasma treatments is investigated on 100 nm thick epitaxial ZnO/Al2O3(000l) deposited by Pulsed Laser Deposition. The plasma treatments were carried on under different gas mixture (O2, Ar, H). The relationship between the optical/electrical properties and process conditions was examined by Fourier Transformation InfraRed spectroscopy (FTIR), photoluminescence and Hall measurements. A study of the stability of plasma treatments was also realized.}
}