@InProceedings{Supelec936,
author = {Alban Maertens and Samuel Margueron and Frédéric Genty and Ouarda Legrani and Thierry Belmonte and Pascal Boulet},
title = {{Influence of RF Plasma on Zinc Oxide Surface Properties}},
year = {2014},
booktitle = {{Proceedings of the Compound Semiconductor Week}},
pages = {1-2},
month = {may},
address = {Montpellier (France)},
abstract = {The changing of surface properties of ZnO using the RF plasma
treatments is investigated on 100 nm thick epitaxial
ZnO/Al2O3(000l) deposited by Pulsed Laser Deposition. The
plasma treatments were carried on under different gas mixture
(O2, Ar, H). The relationship between the optical/electrical
properties and process conditions was examined by Fourier
Transformation InfraRed spectroscopy (FTIR), photoluminescence
and Hall measurements. A study of the stability of plasma
treatments was also realized.}
}