@Article{Supelec933,
author = {Sergei Zhgoon and Alexander Shvetsov and Kushal Bhattacharjee and Ouarda Legrani and Philippe Pigeat and Omar Elmazria},
title = {{Monitored vacuum deposition of dielectric coatings over surface acoustic wave devices}},
journal = {Vacuum Solutions},
year = {2015},
volume = {116},
pages = {1-6},
month = {jun},
doi = {10.1016/j.vacuum.2015.02.022},
abstract = {We report on our experience in the control of magnetron
sputtering process by in-situ monitoring of a surface acoustic
wave (SAW) device (resonator or delay line) electrical
response during the deposition of dielectric layers on the SAW
device surface. While the electrical response changes with
the, growth of different layers, the response monitoring
provides a useful feedback for layer thickness control in a
multiple layer system. The monitoring approach is reproducible
and gives physical insight into the SAW propagation changes
occurring during the fabrication. It serves as a good tool for
obtaining acoustic wave dispersion curves and helps in
verifying theoretical and design principles of building
multiple layer microwave acoustics devices. (C) 2015 Elsevier
Ltd. All rights reserved.}
}