@Article{Supelec870,
author = {Youness Laaroussi and Christyves Chevallier and Frédéric Genty and Nicolas Fressengeas and Laurent Cerutti and Thierry Taliercio and Olivier Gauthier-Lafaye and Pierre-François Calmon and Benjamin Reig and Joel Jacquet and Guilhem Almuneau},
title = {{Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs}},
journal = {Optical Materials Express},
year = {2013},
volume = {3},
number = {10},
pages = {1576-1585},
month = {oct},
url = {http://dx.doi.org/10.1364/OME.3.001576},
doi = {10.1364/OME.3.001576},
abstract = {A new mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) structure is proposed. We have integrated to the VCSEL structure both an oxide aperture for lateral confinement, and a sub-wavelength high-contrast-grating top mirror. Upon the GaSb-based half-VCSEL, we have grown a metamorphic AlGaAs heterostructure to enable thermal oxidation and grating mirror fabrication steps. A methodology based on optimization and anti-optimization methods has been used to design the optical grating, with improved parameter tolerances regarding processing errors. Finally, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure implementing both oxide confinement and a subwavelength grating top mirror.}
}