@Article{Supelec783,
author = {Christyves Chevallier and Nicolas Fressengeas and Frédéric Genty and Joel Jacquet},
title = {{Mid-infrared sub-wavelength grating mirror design: tolerance and influence of technological constraints}},
journal = {Journal of Optics},
year = {2011},
volume = {13},
number = {12},
pages = {125502},
month = {nov},
url = {http://dx.doi.org/10.1088/2040-8978/13/12/125502},
doi = {10.1088/2040-8978/13/12/125502},
abstract = {High polarization selective Si/SiO2 mid-infrared sub-wavelength
grating mirrors with large bandwidth adapted to VCSEL integration
are compared. These mirrors have been automatically designed for
operation at \λ = 2.3 µm by an optimization algorithm which
maximizes a specially defined quality factor. Several
technological constraints in relation with the grating
manufacturing process have been imposed within the optimization
algorithm and their impact on the optical properties of the
mirror have been evaluated. Furthermore, through the tolerance
computation of the different dimensions of the structure, the
robustness with respect to fabrication errors has been tested.
Finally, it appears that the increase of the optical performances
of the mirror imposes a less tolerant design with severer
technological constraints resulting in a more stringent control
of the manufacturing process.}
}