@Article{Supelec781,
author = {Christyves Chevallier and Nicolas Fressengeas and Frédéric Genty and Joel Jacquet},
title = {{Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application}},
journal = {Optical and Quantum Electronics},
year = {2012},
volume = {Online First™},
pages = {1-6},
month = {apr},
url = {http://dx.doi.org/10.1007/s11082-012-9578-8},
doi = {10.1007/s11082-012-9578-8},
abstract = {A Si/Si3N4 high contrast grating mirror has been designed for a VCSEL integration in mid-infrared (\λ = 2.65 µm). The use of an optimization algorithm which maximizes a VCSEL mirror quality factor allowed the adjustment of the grating parameters while keeping large and shallow grating pattern. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances. The final mirror exhibits large high reflectivity bandwidth with a polarization selectivity and several percent of tolerance on the grating dimensions.}
}