@InProceedings{Supelec723,
author = {Frédéric Genty and Samuel Margueron and Sidi Ould Saad Hamady and Jean Claude Petit and Hussein Srour and Andreas Karsaklian dal Bosco and Jonathan Sadok and J Huguenin and Mourad Bouirig and Joel Jacquet},
title = {{Low Temperature Transparent ITO-based Contacts for Mid-IR Applications}},
year = {2011},
booktitle = {{MRS Spring Meeting proceedings}},
pages = {6 pages},
month = {Apr},
address = {San Francisco, CA (USA)},
abstract = {In this work, thin films of Indium Tin Oxide (ITO)-based
materials were tested as potential candidates for mid-IR
transparent contacts on Te-doped GaSb and Si-doped InAs
semiconductor wafers. Since these contacts are devoted to be
inserted in Sb-based devices which are generally MBE-grown at
~450°C, low-temperature fabrication processes were particularly
tested with a maximum temperature of annealing of 400°C. 50
nm-thick ITO films were deposited on glass, Te-doped GaSb and
Si-doped InAs wafers and resistivity of 8.10-4 \Ω.cm combined with
~80% of transmittance at 2 \μm and ohmic contacts with a specific
resistance of 3.10-4 \Ω.cm2 were obtained. Then, in order to
improve these properties in the mid-IR, other ITO-based materials
were tested: In doped ZnO (IZO) and Zn doped ITO (ITZO). The
first results obtained on these materials show that the insertion
of 10% of Zn in classical ITO structure results in a degradation
of the electrical properties of the layer without a real impact
on its optical transmittance near 2 \μm. Concerning IZO, a large
improvement of the transmittance in the whole visible-mid-IR
wavelength range was observed for annealed samples at a
temperature as low as 350°C. However, the electrical resistivity
appears very sensible to the temperature of annealing.}
}