@InProceedings{Supelec711,
author = {Christyves Chevallier and Frédéric Genty and Nicolas Fressengeas and Joel Jacquet},
title = {{Robust design of subwavelength grating mirror for mid-infrared VCSEL application}},
year = {2011},
booktitle = {{Proceedings of NUSOD 2011, 11th International Conference on Numerical Simulation of Optoelectronic Devices 5-8 September 2011, Rome (Italy)}},
pages = {125-126},
month = {sep},
address = {Rome (Italie)},
url = {http://dx.doi.org/10.1109/NUSOD.2011.6041173},
doi = {10.1109/NUSOD.2011.6041173},
abstract = {We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm al- lowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.}
}