@InProceedings{Supelec667,
author = {Christyves Chevallier and Nicolas Fressengeas and Frédéric Genty and Joel Jacquet},
title = {{Optimized sub-wavelength grating mirror design for mid-infrared wavelength range}},
year = {2010},
booktitle = {{International conference on surfaces, coatings and nanostructured materials - NANOSMAT-5}},
month = {oct},
address = {Reims (France)},
abstract = {We present the design of a sub-wavelength grating mirror
optimized for integration in mid-IR VCSEL. The definition of a
quality factor adapted to VCSEL requirements and maximized by an
optimization algorithm allowed us to obtain a polarization
selective and high reflectivity structure showing several
percent of tolerance. The design of the SGM mirror can easily be
adapted to the technological constraints of the manufacturers by
adjusting the limitations defined for the automated optimization
process. Indeed, the comparison between different technological
constraints shows that a better accuracy of the etching process
results in an increase of the quality of the mirror.}
}